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材料簡介
Introduction
FLH331是由合成砂制成的石英材料,具有純度高、少氣泡,無包裹體、透過率高、耐刻蝕、耐高溫等特性。
可運用于半導體先進制程、光學、化學加工、紫外線和高溫窗口等。
FLH331 is a quartz material made of synthetic sand. Thanks to the high purity, few bubbles, no inclusions, high transmittance, etching resistance, high temperature resistance and other characteristics,F(xiàn)LH331 could be used in advanced semiconductor manufacturing process, optics, chemical processing, ultraviolet and high temperature windows,etc.
雜質含量
Chemical purity
FLH331 雜質元素典型值 (ppm)
Al
0.14
B
0
Ca
0.41
Co
0
Cu
0
Fe
0.13
K
0
Li
0
Mg
0.06
Mn
0
Na
0.29
Ni
0
Ti
0
OH
200
紫外光譜透過性能
UV spectral transmittance
氣泡及異物情況
Bubbles and inclusions
氣泡及異物數量 (100g玻璃中允許)
The allowable number of bubbles and foreign matter per 100g of glass
氣泡直徑(mm)及個數
The diameter(mm) and number of bubbles
0.03~0.30
0
0.31~0.70
0
>0.7
0
總數個
0
透明或不透明雜質的直徑(mm)及個數
The diameter (mm) and number of transparent or opaque impurities
0.3~0.7
0
0.8~1.0
0
1.1~3.0
0
總數個
0
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